MICRODISCHARGE-BASED PRESSURE SENSORS FOR OPERATION AT 1000oC
نویسندگان
چکیده
* 1301 Beal Ave., Ann Arbor, MI 48109, USA; Tel: (734) 763-6132, E-mail: [email protected] ABSTRACT This paper reports microdischarge-based pressure sensors which operate by measuring the change in spatial current distribution of pulsed DC microdischarges. The sensors are composed of 3D arrays of horizontal bulk metal electrodes embedded in quartz substrates. Microdischarge-based pressure sensors are well-suited for high temperature operation because of the inherently high temperatures of the charged species that are generated. In this effort, temperatures of up to 1000 ̊C are tested. The pressure sensors have a measurable pressure range of 10-760 Torr and require an active area of only 0.8 mm. The sensor structures are designed to allow for unequal expansion of electrodes and substrate, during high temperature operation. The sensors demonstrate a maximum sensitivity of 5,000 ppm/Torr and temperature coefficients of sensitivity as low as 44 ppm/K.
منابع مشابه
Ion energy distribution and gas heating in the cathode fall of a direct-current microdischarge.
This paper reports on measurements of the ion energy distribution (IED) at the cathode of an argon dc microdischarge using energy-resolved molecular beam mass spectrometry. The measurements are conducted at a fixed pressure-electrode separation product (pd) of 1 cm Torr with a maximum discharge pressure of 20 Torr. The measured IED is compared to the theory of Davis and Vanderslice [W. D. Davis...
متن کاملMultiple microdischarge dynamics in dielectric barrier discharges
Dielectric barrier discharges ~DBDs! are pulsed atmospheric pressure devices in which the plasma forms as an array of microdischarges having diameters expanding from 10 to 100’s mm and area densities of 10 to 100’s cm. The microdischarges are ,10’s ns in duration and are terminated by charging of the dielectric barrier which removes voltage from the gap. If microdischarges are spaced sufficient...
متن کاملMagnetized microdischarge plasma generation at low pressure
A magnetized microdischarge plasma is generated at low pressure with planar electrodes and a non-uniform magnetic field configuration causing closed E×B electron drift. Stable generation with a 1 mm electrode gap has been achieved in 0.5–55 Torr of argon. The breakdown voltage curve is found to have two local minima, the lower of which is believed to be caused by strong electron magnetization, ...
متن کاملSimulation-based Vibration Sensor Placement for Centrifugal Pump Impeller Fault Detection
In this paper, a simulation-based method is proposed for optimal placement of vibration sensors for the purpose of fault detection in a centrifugal pump. The centrifugal pump is modeled to investigate the effect of vane tip fault on fluid flow patterns numerically. Pressure pulsations are investigated at different locations at the inner surface of the pump before and after the presence of the f...
متن کاملNoise Equivalent Power Optimization of Graphene- Superconductor Optical Sensors in the Current Bias Mode
In this paper, the noise equivalent power (NEP) of an optical sensor based ongraphene-superconductor junctions in the constant current mode of operation has beencalculated. Furthermore, the necessary investigations to optimize the device noise withrespect to various parameters such as the operating temperature, magnetic field, deviceresistance, voltage and current bias have been presented. By s...
متن کامل